PRODUCT
RF FILTER
[Quantum] AC Filter
FeaturesHigh Impedance & High Rejection Characteristics
-High Quality RF Filter for TTTM(Tool To Tool Matching)
-Customized Design
ApplicationsGenerally Applied When RF Power and AC Heater are used together
-Semiconductor Equipment PECVD, ALD, ETCH
-Research or Industrial Equipment
상세 정보
| SPECIFICATIONS [Main Filter Module] | |
|---|---|
| Parameters | |
| Frequency Range | 400KHz |
| Input Impedance [IZI mag] | Min. 1KΩ |
| Rejection at LF [S21] | Max. -20dB |
| Power Rating | |
| Allowable Current | Max. 10A |
| Operating Voltage | Max. 220Vac |
| Connector | |
| AC Input | 12P Male 0912 012 3101 & 09 20 003 0301 |
| AC Output [ Customize ] | 2.0mm Circular Copper |
| Fan | 4P Male 206153-1 / 66103-2 / 1-206062-4[1@+24VDC], [2@Ground], [3@Alarm], [4@Alarm] |
| Physical | |
| Size [Next Page] | Customize |
| Environmental & Cooling | |
| Operating Temperature | +5ºC ~ +40ºC |
| Cooling [Fan] | 24VDC @Max. 1A |
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