PRODUCT
RF FILTER
[Quantum] AC Filter
FeaturesHigh Impedance & High Rejection Characteristics
-High Quality RF Filter for TTTM(Tool To Tool Matching)
-Customized Design
ApplicationsGenerally Applied When RF Power and AC Heater are used together
-Semiconductor Equipment PECVD, ALD, ETCH
-Research or Industrial Equipment
상세 정보
| SPECIFICATIONS [Main Filter Module] | |
|---|---|
| Parameters | |
| Frequency Range | Selectable [EX. 27.12MHz] |
| RF Input Impedance [IZI mag] | Min. 1KΩ |
| Rejection at RF [S21] | Max. -45dB |
| Power Rating | |
| Allowable Current | Max. 10A |
| Operating Voltage | Max. 220Vac |
| Connector | |
| AC Input Connector | 1-178138-3 [D3200] 4Port (A, B, C, D) |
| AC Output Connector | 1-178138-3 [D3200] 4Port (A, B, C, D) |
| Fan Connector (Male) | Housing [206061-1] / Terminal [2-66102-5] [1, +24VDC] [2, Ground] [3, Fan1 Alarm] [4, Fan2 Alarm] @Open Collector Type |
| Physical | |
| Size [Next Page] | Customize |
| Environmental & Cooling | |
| Operating Temperature | +5ºC ~ +40ºC |
| Cooling [Fan] | 24VDC @Max. 1A |
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