PRODUCT
RF FILTER
[Quantum] AC Filter
FeatureHigh Impedance & High Rejection Characteristics
-High Quality RF Filter for TTTM(Tool To Tool Matching)
-Customized Design
ApplicationsGenerally Applied When RF Power and AC Heater are used together
-Semiconductor Equipment PECVD, ALD, ETCH
-Research or Industrial Equipment
Detail
| SPECIFICATIONS [Main Filter Module] | |
|---|---|
| Parameters | |
| Frequency Range | Selectable [EX. 400KHz &13.56MHz] |
| LF Input Impedance [IZI mag] | Min. 1KΩ |
| RF Input Impedance [IZI mag] | Min. 1KΩ] |
| Rejection at LF [S21] | Max. -20dB |
| Rejection at RF [S21] | Max. -45dB |
| Power Rating | |
| Allowable Current | Max. 30A |
| Operating Voltage | Max. 220Vac |
| Connector | |
| AC Input & Output [Inner] | 3P Male 09 12 002 2653 & 09 20 003 0301 |
| AC Input & Output [Outer] | 3P Female 09 12 002 2753 & 09 20 003 0301 |
| Fan | 4P Male 206153-1 / 66103-2 / 1-206062-4 [1@+24VDC], [2@Ground], [3@Alarm], [4@Not Used] |
| Physical | |
| Size [Next Page] | Customize |
| Environmental & Cooling | |
| Operating Temperature | +5ºC ~ +40ºC |
| Cooling [Fan] | 24VDC @Max. 1A |
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