REFURBISHMENT
RPS/REVOLUTION
RPS 2L
RPS 3L
RPS 6L
RPS 15L
REVOLUTION I
REVOLUTION III
REVOLUTION V
PARAGON
| MKS RPS 2L | MKS RPS 3L | MKS RPS 6L | MKS RPS 15L / 22L | MKS REVOLUTION / PARAGON |
|---|---|---|---|---|
| AX7651 | AX7645-01 | AX7658-20 | AX7645PS-01 | AX7690PSK |
| AX7651-2 | AX7670 | AX7685-01 | AX7645PS-02 | AX7690LAM |
| AX7657 | AX7670-02 | AX7685-20 | AX7645PS-10 | AX7695PSK |
| AX7657-2 | AX7670-06 | AX7685-30 | AX7645RH-01 | AX7695LAM |
| AX7658 | AX7670-12 | AX7685-33 | AX7645RH-02 | AX7695TEL |
| FI20620 | AX7670-16 | AX7685-85 | AX7645RH-06 | AX7696 |
| FI20620-1 | AX7670-19 | AX7685-91 | AX7645RH-10 | AX7700 |
| ETC | AX7670-20 | FI80131 | AX7645RH-20 | AX7710 |
| AX7670-21 | FI80132 | AX7645RHL-35 | ETC | |
| AX7670-60 | FI80133 | AX7635-03 | ||
| AX7670-80 | FI80620-1 | ETC | ||
| AX7670-85 | ETC | |||
| AX7671-85 | ||||
| ETC |
*The above products are MKS RPS(Remote Plasma Source), Revolution , Paragon, Remote Plasma Generator Including FCIP Revolution, PSK, Lam, NF3 process unit, we provide repair and refurbishment services
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